Equipments
RF-DC Magnetron Sputtering System
Lab Facility
Magnetron Sputtering System with DC and RF power source , Four guns are in confocal geometry.
Split Tube Furnace
Lab Facility
Split Tube Furnace with a PID controller , with a tuning of temperature up to 1200 degree centigrade.
Spin Coater
Lab Facility
Spin Coater ,accommodate wafers upto 200mm diameter with a maximum rotational speed of 12000 RPM.
Chemical Vapour deposition System
Lab Facility
Three Zone Chemical Vapour Deposition system. Maximum temperature of each zone is up to 1200 degree centigrade
X-ray Diffractometer
Materials Science Centre Facility
Scanning Electron Microscope
Materials Science Centre Facility
Semiconductor Parameter Analyzer
Materials Science Centre Facility
Keithley 4200 SCS semiconductor parameter analyzer with 2 SMUs/PMUs/CVUs.
Probe Station
Materials Science Centre Facility
JANIS probe station (model no: ST500-UHT-1-(4CX)) with temperature controller.
Atomic Force Microscope
Materials Science Centre Facility
Cypher S AFM equipped with cAFM, PFM, MFM, EFM, KPFM and nanolithography, advanced modes.